1、Applicable processes：TOPCon

2、Number of core channels：Positive etching channel 3

3、Cassette Spec：100~120 pcs

4、Number of cassettes：6

5、Capacity of equipment：182: ≥16,000 pcs/h；210: ≥12,500 pcs/h

6、Features：

1） With anti-channeling design, it can collect 70% liquid in the cassette to minimize different liquid channeling;

2）Through throttling control device + drain pipe + software compensation algorithm, it can realize a control accuracy at milliliter level;

3）With a distributed coil circulation system, it can improve the cassette deviation caused by circulation and intense reactions;

4）A high precision temperature control system, together with a circulation system can achieve a temperature control accuracy of ±0.5°C in the process channel;

5）With an efficient drying system, it can achieve full dryness in 600-700s depending on models (including cassette);

6） …