Applicable process：CF、Array、TP等

Applicable substrate size：All Size

Applicable substrate thickness：≥0.3mm

Development type：Multi-angle Oscilation Type Shower / Dip

Equipment type：I Type，U Type，Line Type，Custom Made

Process indicators：

1.High Uniformity Ultra-low Pressure Spray； 

2.Excellent Process Reliability，High CD Uniformity； 

3.Defoaming Management； 

4.No Mist, No Roller Mark, No Contamination And No Scratch； 

5.Low Running Cost。