Cleaning quality：No mura, water mark, rust, stain or damage

Flatness：100-micron level

Total pitch variation (TPV)：micron level

Quantity of defects：10ea

Transport repeatability：Millimeter level

Temperature stability：±1°（within 60°）

Ultrasonic：

1、Complex-frequency ultrasonic wave in 4 bands, whose frequency can be freely switched

2、Spherical wave ultrasonic technology without dead zone